Fig. 2. The central part of the first STEM Cs corrector that improved the resolution of the microscope it was built into, with 6 multipole stages containing strong quadrupoles and octupoles, and 96 auxilliary coils for nulling parasitic aberrations. Corrector Ø ~ 12 cm.
The corrector (Fig. 2) is now displayed in a glass case in the Cavendish Lab, next to Deltrap’s proof-of-principle quadrupole-octupole corrector, and not far from the Cavendish’s crown jewels that include the apparatus with which J.J. Thompson discovered the electron in 1897, and the DNA model built by Watson and Crick in 1953.
Fig. 3. Ondrej Krivanek, George Corbin and Niklas Dellby in front of Nion I building, which featured a large garage that we later converted into a mechanical assembly room. Nion can therefore claim that its origins were in the proverbial garage.
We made a really good microscope
The new microscope produced spectacular images of 2D materials such as graphene and of 1D materials such as nanotubes. We got into this field with samples provided by Valeria Nicolosi of TCD in Ireland, and by Kazu Suenaga of AIST Japan. Niklas and I brought these samples to Oak Ridge National Laboratory (ORNL), where we worked over a long weekend on the fourth electron microscope Nion had delivered to a customer. The popular wisdom back then was that the imaging technique we were using – high angle annular dark field (HAADF) imaging – could not usefully image light atoms such as carbon. The signal was supposed to be too weak to make the imaging of single atoms possible. Contrary to that “wisdom”, we started getting spectacularly clear images of nanotubes and graphene at a primary energy of 60 keV, which avoided heavy damage to the samples.
"I had many hours of operating other electron microscopes under my belt, but I had never seen images as clear as the ones I was getting from the Nion instrument."
I am not one given to exclamations, but I remember pausing, pushing my chair back from the control table, and proclaiming: “Niklas, we made a [really] good microscope!”
Fig. 4. Cover of the March 25, 2010 issue of Nature. It shows a medium angle annular dark field (MAADF) STEM image of monolayer BN with atomic substitutions. The experimental image was colorized to correspond to the types of atoms that were identified using image intensities, and rendered in a perspective view.
I was not the only one who thought so. Juan Carlos Idrobo, post-doc at ORNL at that time, walked into the lab one evening, and when he saw the results we were getting, he watched for a long time, as though glued to the spot. He and others began to do similar experiments at ORNL soon after, and a few months later, Matt Chisholm produced an iconic image of a BN monolayer with atomic substitutions that was featured on the cover of Nature (Fig. 4). Results obtained at ORNL later showed how a structure consisting of 6 silicon atoms anchored in a graphene sheet jumped back and forth between two quasi-stable configurations. EEL spectra with revealing fine structure features were obtained from single Si atoms embedded in graphene, at roughly the same time at ORNL and at the Daresbury SuperSTEM lab, semiconducting MoS2 nanowires were sculpted from a 2D MoS2 sheet also at ORNL, and a research group at the University of Vienna was able to “drive” a single Si atom in chosen directions in a graphene sheet by the electron beam.The increase in the available beam current allowed the elemental composition of materials to be efficiently mapped at atomic resolution both by EELS and by energy-dispersive X-ray spectroscopy (EDXS), precisely as we had expected.
Bonding information can be mapped too, using chemical shifts in EEL spectra of different elements (Fig. 5). All these capabilities amount to just a small fraction of the different kinds of research enabled by Nion’s aberration-corrected STEMs. There are now over 20 of these instruments in the world, and about 1000 aberration-corrected STEMs made by other manufacturers. It is no longer possible to cover all the creative work that’s being done with these instruments in a single monograph.
Fig. 5. EELS map of Eu atoms in EuTiO3 crystal leading to an atomically sharp interface with DyScO3. The intensity of each pixel in the map shows the Eu concentration worked out from a spectrum acquired at that pixel, the colour whether the atoms were 3+Eu (green) or 2+Eu (red). Insert shows Eu M4,5 edge threshold peaks from the interface (green) and away from it (red), with chemical shift of 2.5 eV due to the change in the Eu valence. L. Kourkoutis, D.A. Muller et al., proceedings IMC17 (Rio de Janeiro, 2010).
Major developments
Nion’s incredibly capable team, led by Niklas Dellby, Tracy Lovejoy, Chris Meyer, George Corbin, and myself, has done many amazing things. Aberration correction is now an established technique of electron microscopy, and we have focused on two new directions: developing flexible and user-friendly open-source software for imaging and analysis, and improving the energy resolution of electron energy loss spectroscopy.
Our software effort augments the advances made by aberration correction, making the instruments more powerful and user-friendly. The improved energy resolution would not have been possible without aberration correction: the monochromator and the electron energy loss spectrometer we have developed both use design principles we first introduced for aberration correction. The optical properties and unsurpassed stabilities of these instruments have pushed the energy resolution of EELS to 3 meV (100x energy resolution improvement relative to an electron microscope not using a monochromator), and 5 meV is attainable on a routine basis. This resolution level allows vibrational spectroscopy to be performed in the electron microscope, and it has opened up major new research areas: 0.2-2 nm spatial resolution imaging of phonons, including acoustic ones, and their interaction with crystal defects; the ability to detect and map hydrogen distributions; distinguishing different isotopes (Fig. 6); and damage-free analysis of organic and biological samples.
Fig. 6. Experimental vibrational spectra of two forms of the amino acid L-alanine, differing by a single 12C atom substituted by 13C. The 4.8 meV shift of the large peak at ~200 meV, due to the stretch of the C=O bond, can be mapped to reveal where the two types of molecules reside, at about 100 nm spatial resolution. J. Hachtel et al., Science 363 (2019) 525–528.
Bumps in the road for new projects
The ability to analyse the vibrational signature of biological samples without significant damage in the electron microscope is especially exciting. It relies on the fact that at the vibrational energies that we study (20-500 meV), the dipole interaction that excites optical phonons is delocalized, and it is possible to excite molecular vibrations in sample areas 30-100 nm or even further away from the electron beam. The energy that can be transferred to the sample by each fast electron is typically limited to < 1eV when the beam is that far away, and there is no significant radiation damage. The spatial resolution is not as good as when the electron beam is brought onto the sample and non-dipole signals are utilized, but a technique that can probe what molecules are present where in frozen hydrated biological samples at 30-100 nm resolution should still have plenty of important uses.
I was pursuing this idea in a research stay in Christoph Koch’s group at Humboldt University in Berlin, collaborating with Christoph, Benedikt Haas, Zdravko Kochovski, and Johannes Müller at HU, and Tracy Lovejoy, Niklas Dellby and Andreas Mittelberger at Nion. We had put together all the needed instrumentation and were about to start on experiments when the coronavirus pandemic hit, and I decided to return to Washington State.We plan to resume the work as soon as the pandemic allows.
A grateful scientist
Instrumentation developments resemble probing an uncharted territory, similar to the way the American Pacific Northwest was explored by Alexander Mackenzie and David Thompson over 200 years ago. Best guesses as to what welcoming lands may lie in which direction are followed by the long slog of an expedition, with day-to-day ingenuity in overcoming hardships and obstacles making the difference between failure and success. All the explorers contribute their utmost, and random encounters sometimes bring critical pushes in the right directions. I am deeply thankful to my co-explorers at Nion and in the labs we collaborate with for their incredibly fruitful efforts (Fig. 7).
Fig. 7. August 2019 Nion Open House group photo showing the Nion team including Niklas Dellby, Tracy Lovejoy, Chris Meyer, George Corbin, Russ Hayner, Matt Hoffman, Peter Hrncirik, Nils Johnson, Josh Kas, Ben Plotkin-Swing, Lemek Robinson, Zoltan Szilagyi, Dylan Taylor, Janet Willis and Ondrej Krivanek, and Nion collaborators: Toshi Aoki, Nabil Bassim, Phil Batson, Andrew Bleloch, Wouter van den Broek, Peter Crozier, Christian Dwyer, Meiken Falke, Jordan Hachtel, Fredrik Hage, Bethany Hudak, Juan Carlos Idrobo, Demie Kepaptsoglou, Jani Kotakoski, Richard Leapman, Andy Lupini, Alan Maigne, Clemens Mangler, Molly McCartney, David Muller, Matt Murfitt, Xiaoqing Pan, Luca Piazza, Quentin Ramasse, David Smith, Rhonda Stroud, Toma Susi, Luiz Tizei, Kartik Venkatraman, Wu Zhou and many others
I am especially grateful to Niklas Dellby, with whom we founded Nion, and with whom I have enjoyed working together for nearly 30 years. Without his brilliance and hard work, the progress described here would not have been possible. What a voyage it has been!
Fig. 8. Eda Lacar and Ondrej Krivanek in front of Arizona State University’s Southwestern Center for Aberration-Corrected Electron Microscopy. The center houses three aberration-corrected electron microscopes and plays a world-leading role in nanocharacterization.
Extended explorations are not easy on those we love, and it is their caring and support that allow us to go on. I thank my daughters Michelle and Astrid, and my nephew David for their love and understanding, and I am deeply grateful to Eda Lacar (Fig. 8) for her love and support. She expands my horizons in many wonderful and unexpected ways, and makes me into a better person.